Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9422512 | Cleaning liquid for semiconductor elements and cleaning method using same | Kenji Shimada, Toshiyuki Oie, Ryota Nakayama | 2016-08-23 |
| 9334161 | Processing liquid for suppressing pattern collapse of fine metal structure and method for producing fine metal structure using same | Hiroshi Matsunaga, Kenji Yamada | 2016-05-10 |