Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9527938 | Copolymer for lithography and method of manufacturing the same, resist composition, and method of manufacturing substrate | Atsushi Yasuda, Miho Chujo | 2016-12-27 |
| 9296842 | Polymer for lithography | Atsushi Yasuda, Daisuke Matsumoto, Keisuke Katou, Shinichi Maeda | 2016-03-29 |