Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9422640 | Single-crystal 4H-SiC substrate | Akihito Ohno, Zempei Kawazu, Nobuyuki Tomita, Takanori Tanaka, Yoichiro Mitani | 2016-08-23 |
| 9400172 | Film thickness measurement method | Ryo Hattori | 2016-07-26 |