Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9266715 | SOI wafer, manufacturing method therefor, and MEMS device | Jyunichi Ichikawa, Yukihisa Yoshida | 2016-02-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9266715 | SOI wafer, manufacturing method therefor, and MEMS device | Jyunichi Ichikawa, Yukihisa Yoshida | 2016-02-23 |