Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9484187 | Arrangement for transporting radicals | Marc Smits | 2016-11-01 |
| 9449789 | Apparatus and method for inspecting a surface of a sample | — | 2016-09-20 |
| 9378921 | Integrated optical and charged particle inspection apparatus | Jacob Pieter Hoogenboom, Aernout Christiaan Zonnevylle, Angela Carolina Narváez-González | 2016-06-28 |