Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9255323 | Sputtering target including a feature to reduce chalcogen build up and arcing on a backing tube | Robert Martinson, Heinrich Von Bunau, Ron Rulkens, Tom Heckel, Johannes Vlcek | 2016-02-09 |