Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 9279758 | Method and apparatus for diagnosing status of parts in real time in plasma processing equipment | — | 2016-03-08 | $23,224,000 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 9279758 | Method and apparatus for diagnosing status of parts in real time in plasma processing equipment | — | 2016-03-08 | $23,224,000 |