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Arul N. Dhas

Lam Research: 1 patents #108 of 356Top 35%
Overall (2016): #462,254 of 481,213Top 100%
1
Patents 2016

Issued Patents 2016

Patent #TitleCo-InventorsDate
9328416 Method for the reduction of defectivity in vapor deposited films Akhil Singhal, Ming Li, Kareem Boumatar 2016-05-03