Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9448014 | Channel member, and heat exchanger, semiconductor unit, and semiconductor manufacturing apparatus including the same | Kenji Tsubokawa, Kazuhiko Fujio, Hiroyuki Abe | 2016-09-20 |