Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9389345 | Optical element, illumination device, measurement apparatus, photomask, exposure method, and device manufacturing method | — | 2016-07-12 |
| 9369963 | Wireless terminal device and communication control method | Masaya Kawakita | 2016-06-14 |
| 9291666 | Detecting device and current sensor | Hiroshi Ueno, Kenji Kanemaru, Francois Piette, Wouter Leten | 2016-03-22 |