Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9437446 | Slurry for chemical mechanical polishing and chemical mechanical polishing method | Mitsuru Kato, Shinya Kato | 2016-09-06 |
| 9321142 | Polymer material, foam obtained from same, and polishing pad using those | Shinya Kato, Shunji Kaneda, Hirofumi Kikuchi | 2016-04-26 |