Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9373484 | Plasma generator, manufacturing method of rotating electrode for plasma generator, method for performing plasma treatment of substrate, and method for forming thin film having mixed structure by using plasma | Kee-Seok Nam, Jung-Dae Kwon, Yong-Soo Jeong, Jung Heum Yoon, Sung-Hun Lee +4 more | 2016-06-21 |