Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9476121 | Apparatus of chemical vapor deposition with a showerhead regulating injection velocity of reactive gases positively and method thereof | Chul Soo Byun | 2016-10-25 |
| 9469900 | Apparatus of chemical vapor deposition with a showerhead regulating injection velocity of reactive gases positively and method thereof | Chul Soo Byun | 2016-10-18 |
| 9315897 | Showerhead for film depositing vacuum equipment | Chulsoo Byun, Il Yong Chung, Seok Woo Lee | 2016-04-19 |