Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9399819 | Deposition apparatus and deposition method | — | 2016-07-26 |
| 9371583 | Plasma processing member, deposition apparatus including the same, and depositing method using the same | Ki Jong Kim, Jin Su Lee, Se Yong Kim | 2016-06-21 |