Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9390905 | Method for manufacturing silicon substrate and silicon substrate | Koji Ebara, Shuji Takahashi | 2016-07-12 |
| 9252025 | Method for manufacturing silicon single crystal wafer and electronic device | Koji Ebara | 2016-02-02 |