Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9400794 | Group management apparatus, substrate processing system and method of managing files of substrate processing apparatus | Osamu Ueda, Hiroyuki Iwakura | 2016-07-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9400794 | Group management apparatus, substrate processing system and method of managing files of substrate processing apparatus | Osamu Ueda, Hiroyuki Iwakura | 2016-07-26 |