Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9279182 | Apparatus for forming metal oxide film, method for forming metal oxide film, and metal oxide film | Takahiro Shirahata, Hiroyuki Orita, Akio Yoshida, Shizuo Fujita | 2016-03-08 |