Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9298106 | Wafer stage with reciprocating wafer stage actuation control | Upendra Ummethala, Layton Hale | 2016-03-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9298106 | Wafer stage with reciprocating wafer stage actuation control | Upendra Ummethala, Layton Hale | 2016-03-29 |