Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9279663 | Method and apparatus to fold optics in tools for measuring shape and/or thickness of a large and thin substrate | Chunhai Wang, Andrew Zeng, Frederick Arnold Goodman, Shouhong Tang, Yi Zhang | 2016-03-08 |