Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9417191 | Using reflected and transmission maps to detect reticle degradation | Rui-fang Shi | 2016-08-16 |
| 9390494 | Delta die intensity map measurement | — | 2016-07-12 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9417191 | Using reflected and transmission maps to detect reticle degradation | Rui-fang Shi | 2016-08-16 |
| 9390494 | Delta die intensity map measurement | — | 2016-07-12 |