Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9371427 | Pattern forming method | Katsutoshi Kobayashi, Hiroki Yonemitsu, Hitoshi Kubota, Ayako Kawanishi | 2016-06-21 |
| 9252027 | Method of forming pattern, manufacturing method of semiconductor device and template | Kei Kobayashi | 2016-02-02 |