Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9459093 | Deflection measuring device and deflection measuring method | Hidenori Sato | 2016-10-04 |
| 9429849 | Adjusting method of pattern transferring plate, laser application machine and pattern transferring plate | Hidenori Sato | 2016-08-30 |
| 9396299 | Reticle mark arrangement method and nontransitory computer readable medium storing a reticle mark arrangement program | Shinichi Nakagawa, Kazuhiro Segawa, Manabu Takakuwa, Motohiro Okada | 2016-07-19 |
| 9368413 | Light exposure condition analysis method, nontransitory computer readable medium storing a light exposure condition analysis program, and manufacturing method for a semiconductor device | Yoshimitsu Kato, Kazufumi Shiozawa | 2016-06-14 |
| 9354527 | Overlay displacement amount measuring method, positional displacement amount measuring method and positional displacement amount measuring apparatus | Hidenori Sato | 2016-05-31 |
| 9260300 | Pattern formation method and pattern formation apparatus | Kentaro Matsunaga, Eiji Yoneda | 2016-02-16 |
| 9239526 | Exposure apparatus and transfer characteristics measuring method | Hidenori Sato, Kazuhiro Segawa | 2016-01-19 |