Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9437476 | Method of manufacturing semiconductor device including air gap between patterns | Ichiro Mizushima, Shinichi Nakao | 2016-09-06 |
| 9431291 | Method of making openings in a semiconductor device with reduced residue by transferring layers | — | 2016-08-30 |
| 9278373 | Spin coating apparatus and method | — | 2016-03-08 |