Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502318 | Polish apparatus, polish method, and method of manufacturing semiconductor device | Dai Fukushima, Takashi Watanabe | 2016-11-22 |
| 9296083 | Polishing apparatus and polishing method | Dai Fukushima, Takashi Watanabe | 2016-03-29 |