Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9431229 | Sputter neutral particle mass spectrometry apparatus with optical element | Toma Yorisaki, Reiko Saito | 2016-08-30 |
| 9287104 | Material inspection apparatus and material inspection method | — | 2016-03-15 |