Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9398732 | Power supplying means having shielding means for feeding line and substrate processing apparatus including the same | Jae-Chul Do, Bu-Il JEON, Myung-Gon SONG | 2016-07-19 |