Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9417527 | Resist pattern-forming method, substrate-processing method, and photoresist composition | Yuichiro Katsura, Motoyuki Shima, Yuji Yada, Ken Nakakura | 2016-08-16 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9417527 | Resist pattern-forming method, substrate-processing method, and photoresist composition | Yuichiro Katsura, Motoyuki Shima, Yuji Yada, Ken Nakakura | 2016-08-16 |