Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9500843 | Beam focusing and beam collecting optics | Martin M. Liphardt, Ping He, Galen L. Pfeiffer | 2016-11-22 |
| 9442016 | Reflective focusing optics | Martin M. Liphardt, Ping He, Galen L. Pfeiffer | 2016-09-13 |
| 9347768 | In line ellipsometer system and method of use | Galen L. Pfeiffer, Blaine D. Johs, Brian D. Guenther, Martin M. Liphardt | 2016-05-24 |