Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9416445 | Method for treating inner surface of chlorine trifluoride supply passage in apparatus using chlorine trifluoride | Kunihiko Koike, Manabu Saeda, Toshiki Manabe | 2016-08-16 |