Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9476841 | High-brightness LPP EUV light source | Pavel Stanislavovich Antsiferov, Aleksandr Yurievich Vinokhodov, Vladimir Vitalievich Ivanov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich KRYVOKORYTOV +7 more | 2016-10-25 |
| 9368337 | Light source with laser pumping and method for generating radiation | Pavel Stanislavovich Antsiferov, Konstantin Nikolaevich Koshelev, Aleksandr Andreevich Lash | 2016-06-14 |
| 9357627 | Light source with laser pumping and method for generating radiation | Pavel Stanislavovich Antsiferov, Konstantin Nikolaevich Koshelev, Aleksandr Andreevich Lash | 2016-05-31 |