Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520308 | Temperature control system for semiconductor manufacturing system | Min Jin Han | 2016-12-13 |
| 9395249 | Wide range temperature control system for semiconductor manufacturing equipment using thermoelectric element | Min Jin Han | 2016-07-19 |