YA

Yu Asami

NT Nuflare Technology: 1 patents #25 of 78Top 35%
Overall (2016): #172,154 of 481,213Top 40%
1
Patents 2016

Issued Patents 2016

Patent #TitleCo-InventorsDate
9299531 Mask cover, charged particle beam drawing apparatus and charged particle beam drawing method Michihiro Kawaguchi 2016-03-29