Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9525398 | Single crystal micromechanical resonator and fabrication methods thereof | Roy H. Olsson, Thomas A. Friedmann, Sara Jensen Homeijer, Michael Wiwi, Khalid Mikhiel Hattar +2 more | 2016-12-20 |
| 9484216 | Methods for dry etching semiconductor devices | Andrew John Gross, Peggy J. Clews, Roy H. Olsson | 2016-11-01 |