Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9397232 | Nitride semiconductor epitaxial substrate and nitride semiconductor device | Hajime Fujikura, Michiko Matsuda | 2016-07-19 |
| 9359692 | Metal chloride gas generator, hydride vapor phase epitaxy growth apparatus, and method for fabricating a nitride semiconductor template | Hajime Fujikura | 2016-06-07 |
| 9236252 | Metal chloride gas generator, hydride vapor phase epitaxy growth apparatus, and nitride semiconductor template | Hajime Fujikura, Michiko Matsuda | 2016-01-12 |