Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9260263 | Substrate aligning unit, substrate processing apparatus having the same, and method of aligning substrate using the same | Kyeong-Min Yeo, Min Uk Kim, Hyun-Seok Kim, Jae-Hyuk Chang, Sung-hee Lee | 2016-02-16 |