Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9340414 | Method and structure of monolithically integrated absolute pressure sensor | Anthony Flannery | 2016-05-17 |
| 9291638 | Substrate curvature compensation methods and apparatus | Raymond Merrill, Jr., Anthony Flannery | 2016-03-22 |
| 9246017 | MEMS-based dual and single proof-mass accelerometer methods and apparatus | Dolf van der Heide | 2016-01-26 |