Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502759 | Antenna cover and plasma generating device using same | Masateru Sato | 2016-11-22 |
| 9379030 | Ion implantation method and ion implantation apparatus | Tadanobu Kagawa, Toshio Yumiyama, Akira Funai, Takashi Kuroda | 2016-06-28 |
| 9305784 | Ion implantation method and ion implantation apparatus | Yasuharu Okamoto, Toshio Yumiyama, Akihiro Ochi | 2016-04-05 |