Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9403187 | Substrate processing method and substrate processing apparatus | Ryo MURAMOTO, Yasuhiko Nagai, Tsutomu OSUKA, Keiji Iwata | 2016-08-02 |
| 9340761 | Substrate processing method and substrate processing apparatus | Ryo MURAMOTO, Yasuhiko Nagai, Tsutomu OSUKA, Keiji Iwata | 2016-05-17 |