Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9465286 | Photomask, method of correcting error thereof, integrated circuit device manufactured by using the photomask, and method of manufacturing the integrated circuit device | Sang Hyun Kim, Dong Gun Lee | 2016-10-11 |
| 9239516 | Method of manufacturing reflective extreme ultraviolet mask | Tae Geun Kim, Dong-Wan Kim, Dong Gun Lee | 2016-01-19 |