| 9513310 |
High-sensitivity, z-axis micro-electro-mechanical detection structure, in particular for an MEMS accelerometer |
Leonardo Baldasarre, Alessandro Tocchio |
2016-12-06 |
| 9470526 |
Microelectromechanical gyroscope with rotary driving motion and improved electrical properties |
Luca Coronato, Gabriele Cazzaniga |
2016-10-18 |
| 9423474 |
Integrated multilayer magnetoresistive sensor and manufacturing method thereof |
Dario Paci, Benedetto Vigna |
2016-08-23 |
| 9377482 |
Detection structure for a Z-axis resonant accelerometer |
Claudia Comi, Alberto Corigliano |
2016-06-28 |
| 9340413 |
Integrated acoustic transducer in MEMS technology, and manufacturing process thereof |
Angelo Merassi, Luca Coronato |
2016-05-17 |
| RE45855 |
Microelectromechanical sensor with improved mechanical decoupling of sensing and driving modes |
Luca Coronato, Alessandro Balzelli Ludovico |
2016-01-19 |