Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9443702 | Methods for plasma processing | Stephen E. Savas, Carl Galewski, Allan B. Wiesnoski, Sooyun Joh | 2016-09-13 |
| 9359674 | Apparatus and method for dielectric deposition | Stephen E. Savas, Sooyun Joh, Allan B. Wiesnoski, Carl Galewski | 2016-06-07 |