Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9437419 | Method of forming a layer using a trialkylsilane silicon precursor compound | Younsoo Kim, Hiroki Sato, Tsubasa Shiratori, Naoki Yamada, Chayoung Yoo +3 more | 2016-09-06 |