Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9335540 | MEMS device with improved via support planarization | Lucius M. Sherwin, Jose Antonio Martinez, Sean O'Brien | 2016-05-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9335540 | MEMS device with improved via support planarization | Lucius M. Sherwin, Jose Antonio Martinez, Sean O'Brien | 2016-05-10 |