Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9245716 | Edge-clamped and mechanically fastened inner electrode of showerhead electrode assembly | Anthony de la Llera | 2016-01-26 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9245716 | Edge-clamped and mechanically fastened inner electrode of showerhead electrode assembly | Anthony de la Llera | 2016-01-26 |