Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9490116 | Gate stack materials for semiconductor applications for lithographic overlay improvement | Michael Wenyoung Tsiang, Xinhai Han, Nagarajan Rajagopalan, Bok Hoen Kim, Tsutomu Kiyohara +1 more | 2016-11-08 |
| 9390910 | Gas flow profile modulated control of overlay in plasma CVD films | Prashant Kumar Kulshreshtha, Sudha Rathi, Saptarshi Basu, Kwangduk Douglas Lee, Martin Jay Seamons +5 more | 2016-07-12 |