Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494529 | Chromatic confocal device and method for 2D/3D inspection of an object such as a wafer with variable spatial resolution | Gilles Fresquet, Alain Courteville | 2016-11-15 |
| 9389189 | Dark-field semiconductor wafer inspection device | Frederic Pernot | 2016-07-12 |