Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9523918 | Illumination optical assembly, exposure device, and device manufacturing method | Kinya Kato | 2016-12-20 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9523918 | Illumination optical assembly, exposure device, and device manufacturing method | Kinya Kato | 2016-12-20 |