Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466475 | Ashing device | Takashi Kurimoto, Kyuzo Nakamura, Koukou Suu, Toshiya Yogo, Kazushige Komatsu +1 more | 2016-10-11 |
| 9305752 | Method for operating substrate processing apparatus | Yutaka Kokaze, Yoshiaki Yoshida | 2016-04-05 |