Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466430 | Variable capacitor and switch structures in single crystal piezoelectric MEMS devices using bimorphs | — | 2016-10-11 |
| 9391588 | MEMS vibrating structure using an orientation dependent single-crystal piezoelectric thin film layer | Sergei Zhgoon | 2016-07-12 |
| 9385685 | MEMS vibrating structure using an orientation dependent single-crystal piezoelectric thin film layer | Sergei Zhgoon | 2016-07-05 |
| 9369105 | Method for manufacturing a vibrating MEMS circuit | Sheng-Shian Li, Seungbae Lee | 2016-06-14 |