Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9384943 | Ion generating apparatus and method of removing a fluorine compound deposited in a source housing thereof | — | 2016-07-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9384943 | Ion generating apparatus and method of removing a fluorine compound deposited in a source housing thereof | — | 2016-07-05 |